Nexensor nXF-3

Freeform surface measuring system

nXF-3 is the world’s first product to measure the warp & bow of highly reflective or transparent products such as wafers and films by applying ‘deflectometry’.

Available on backorder


3D surface shape measurement of products with various curved & specular/rough surfaces

By providing quantitative and accurate measurement values as well as the surface shape of products, it improves process stabilization and efficiency. In addition, it can measure and inspect the surface shape of various specular materials to measure warpage and dents on the film surface, secondary battery pouch, hydrogen battery thin plate, automobile paint, and so on, with high reliability.

Product Specification

Measurement Area (F.O.V.)310 mm x 310 mm
Measurement ModeDeflectometry
Repeatability1 μm
Scan Time1 sec
Pixel Resolution60.5 μm


Nexensor nXF-3 Datasheet

Key Features

  • Inspection of shiny or transparent product surfaces
  • Various FOVs applied

  • Applicable to the mass production line
  • High precision

  • Simple measuring process
  • Various data analysis
  • Easy user interface


The world’s first wafer hard face/rough face. Development of simultaneous measurement technology.

Additional information


Brand Series