Nexensor nXI-2 S Type

White-light interferometric displacement sensor for large areas

nXI-2 adopts interferometry, a technology used to calibrate precision measuring equipment and deliver precision measurement of large areas. While generating a mass amount of data, nXI-2 measures ten times faster than the conventional interferometry method and provides reliable data, thus delivering various information to improve process efficiency and production quality. Because it can measure a wide area at a fast speed, nXI-2 is the right fit for mass production lines and, its advanced measuring technology ensures high reliability of measurements.

Available on backorder

Description

Ultra-high speed shape measurement of large-area products

nXI-2 measures step, thickness, and roughness, and hence can use for measuring spots of an ㎛ or less, such as the microstructures, bumps, and roughness of semiconductors, and the column spacers, surface structures, and protrusions by foreign substances in displays, etc. In addition, it can separate thin films and so excels in measuring products with multilayer structures. nXI-2 measures up to FOV 33 ㎜ × 22 ㎜ and hence is used to measure various products.

Product Specification

TypeS
Measurement Area (F.O.V.)9 mm x 6 mm
Pixel Resolution1.95 μm
Repeatability100 nm
Scan Time< 1 sec
Vertical Resolution (Z)3 / 6 nm
D.O.F.100 μm

Datasheet

Nexensor nXI-2 Datasheet

Key Features

  • Large area measuring FOV 33 ㎜ × 22 ㎜
  • A high- resolution image sensor (4000 X 3000 pixel resolution)

  • Applicable to the mass production line
  • Fast processing of high- resolution images

  • Simple SW interface
  • Real-time measurement sharing by shared memory

Application

Additional information

Brand

Brand Series

Technology