Nexensor nXI-5C 20X

Compact white light interferometric displacement sensor

It is very convenient to apply to the mass production line with a much faster measurement speed than before, and the high-level measurement technology provides high reliability for the results.

Available on backorder

Description

Ultra-precise and high-speed 3D microstructure measurement

It can measure the difference in height, thickness, and roughness, so it is used for measurement of microstructures of semiconductors, bumps, roughness, column spacers of displays, surface structures, and protrusions caused by foreign substances.

Product Specification

Type20X
Measurement Area (F.O.V.)0.166 mm x 0.166 mm
Working Distance4.7 mm
Numerical Aperture (N.A.)0.4
Pixel Resolution0.17 μm
Scan Time< 1 sec
Repeatability30 nm
Vertical Resolution (Z)2 / 6 / 12 nm

Datasheet

Nexensor nXI-5C Datasheet

Key Features

  • L Real-time multilayer (membrane) separation algorithm and measurement

  • Applicable to the mass production line
  • Fast measuring and data acquisition
  • High precision

  • Simple measurement process
  • Various data analysis
  • Easy user interface
  • Minimum space for installation

Application

Additional information

Brand

Brand Series

Technology