Nexensor nXI-5T 100X

Turret type White-light Interferometric displacement

It is highly convenient to apply the advanced measurement technology, which offers a high level of reliability in the results, with a much faster measurement speed than before in mass production lines.

Available on backorder


Ultra-Precision, Fast 3D Measurement of Microstructure

nXI-5T can measure deviations, thickness, and illumination, and is used to measure microstructures of semiconductors, column spacers in bumps and displays, surface structures, and bumps caused by foreign substances, all with a resolution of less than a micrometer (μm).

Product Specification

Measurement Area (F.O.V.)0.096 mm x 0.096 mm
Working Distance2.0 mm
Numerical Aperture (N.A.)0.7
Pixel Resolution0.1 μm
Scan Time< 1 sec
Repeatability30 nm
Vertical Resolution (Z)1.5 nm


Nexensor nXI-5T Datasheet

Key Features

  • L Real-time multilayer (membrane) separation algorithm and measurement

  • Applicable to the mass production line
  • Fast measuring and data acquisition
  • High precision

  • Simple measurement process
  • Various data analysis
  • Easy user interface
  • Minimum space for installation


Additional information


Brand Series