Description
Customized Target based on Chrome on ceramic
- Pattern size: 83mm x 62mm; Dot array: 13 x 15; Dot diameter: 2.5mm; Light on dark
- Position of 5 groups of the characteristic dots: [6,2,2,10,10][7,2,12,2,12]
- Compatible with the Halcon Edition12 calibration
Manufacturing Process
- Direct write lithography technology to make chrome pattern on chrome mask layer above soda lime glass (float glass) substrate to ensure within +/-1um overall accuracy.
- Minimum feature size: Down to 0.75 μm
- Address grid: Down to 12.5 nm
- Exchangeable write modes
- Real-time autofocus system
- High power DPSS laser with 355 nm wavelength
- Camera system for metrology and alignment
- Closed-loop climate chamber
- Edge detector system
Illustration
