Description
Customized Target based on Chrome on ceramic
- Dimensions: 10mm x 10mm; Dot array: 7 x 7; Dot spacing 1.25mm; Dot diameter: 0.625mm
- Comptaible with the Halcon calibration
Manufacturing Process
- Direct write lithography technology to make chrome pattern on chrome mask layer above soda lime glass (float glass) substrate to ensure within +/-1um overall accuracy.
- Minimum feature size: Down to 0.75 μm
- Address grid: Down to 12.5 nm
- Exchangeable write modes
- Real-time autofocus system
- High power DPSS laser with 355 nm wavelength
- Camera system for metrology and alignment
- Closed-loop climate chamber
- Edge detector system
Illustration
