Description
Customized Target based on Chrome on ceramic
- Dimensions: 38mm x 38mm; Dot array: 13 x 12; Grid size: 2.0mm x 2.0mm; Chrome on ceramic
- Checkerboard Series allows you to implement your own calibration algorithms
Manufacturing Process
- Direct write lithography technology to make chrome pattern on chrome mask layer above soda lime glass (float glass) substrate to ensure within +/-1um overall accuracy.
- Minimum feature size: Down to 0.75 μm
- Address grid: Down to 12.5 nm
- Exchangeable write modes
- Real-time autofocus system
- High power DPSS laser with 355 nm wavelength
- Camera system for metrology and alignment
- Closed-loop climate chamber
- Edge detector system
Illustration
