Description
Customized Target based on Chrome on soda lime glass (float glass)
- Minimum: Group -2, Element 1; Maximum: Group 5, Element 5, Positive type
Manufacturing Process
- Direct write lithography technology to make chrome pattern on chrome mask layer above soda lime glass (float glass) substrate to ensure within +/-1um overall accuracy.
- Minimum feature size: Down to 0.75 μm
- Address grid: Down to 12.5 nm
- Exchangeable write modes
- Real-time autofocus system
- High power DPSS laser with 355 nm wavelength
- Camera system for metrology and alignment
- Closed-loop climate chamber
- Edge detector system
Illustration
